Solutions for semiconductor process, facility monitoring and control CONTACT US Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing monitoring and measurement instrumentation for precise chemical compositions and atmospheric conditions. Vaisala offering for semiconductor manufacturing Vaisala offers trusted and reliable measurements for semiconductor manufacturers and MEMS foundries, semiconductor equipment vendors, fab operators, and material suppliers. The semicon process refractometers are for in-line concentration monitoring in bulk chemical and slurry delivery dispensing, and point-of-use blending, spiking, and polishing processes. Vaisala's accurate measurement instruments of air pressure, temperature, and humidity provide precise data on the manufacturing environment and offer superior accuracy, long-term stability, and rapid response time. Technology comparison Download technology comparison sheet and see how Vaisala's dew point probe compares to CRDS' (Cavity Ring-Down Spectrometer) and Chilled mirror transmitters in the most demanding operating environments, such as semiconductor manufacturing. Download comparison table Applications Wet chemistries real-time Semiconductor wafer plants consume tons of chemicals throughout the whole fab process. The reliability of each chemical solution is top concern of fabs, as even the slightest deviation from specification can result in expensive equipment contamination and wafer scrap. READ MORE ABOUT FAB CHEMICAL PROCESS MONITORING Wafer quality in photolithography Integrated circuit pattern quality in semiconductor manufacturing depends on the stepper conditions. Enhance precision air conditioning and wafer stepper process capacity with accurate air pressure, temperature, and humidity measurement. FIND RELATED PRODUCTS (PDF) Compressed air and N2 process lines If you are using compressed air or nitrogen process lines, dew point measurement will help you save resources by avoiding excessive air drying and corrosion of the equipment. Vaisala’s DRYCAP technology enables quick response time with accuracy and low maintenance needs. FIND RELATED PRODUCTS Facility control Insufficient ventilation decreases not only employee well-being but also productivity substantially, as much 18%. With accurate humidity, CO2, and temperature measurement using reliable, durable, and traceable HVAC sensors, both energy efficiency and employee well-being can be achieved simultaneously. FIND RELATED PRODUCTS Why Vaisala? Vaisala is a deep expert of the semiconductor industry and a trusted partner for our customers. We have a thorough, inside-out understanding of the business by designing and manufacturing products to different critical semiconductor processes from chemicals and process quality monitoring to ambient air monitoring. Our process understanding is completed by our own in-house cleanroom and manufacturing high-quality microchips to Vaisala products and for R&D purposes. Vaisala is committed to supporting products throughout the entire lifecycle, and superior services and support is offered locally near you. CONTACT US Semiconductor manufacturing related products Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C. Read more Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Read more Indigo80 handheld measurement device The latest addition to the Indigo family of transmitters and probes, the Indigo80 is a compact, handheld indicator and data logger. Read more Indigo300 transmitter Vaisala Indigo300 transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. Read more Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features. Read more Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Read more Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications. Read more Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications. Read more Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability. Read more Vaisala K-PATENTS® Semicon Refractometer PR-33-S A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting. Read more More information Expert article Boost wafer quality and yield through data-driven real-time slurry management The composition of the slurry used in the chemical mechanical polishing (CMP) processing step greatly impacts wafer quality. Vaisala's inline process refractometers enable real-time monitoring of slurry composition, ensuring batch-to-batch consistency and optimal wafer quality. Read more Expert article How to improve humidity measurements in extremely dry environments Case example of high-purity gases in process industrySome of the most challenging industrial processes, such as pure gas production or semiconductor fabrication, require very accurate measurements of trace moisture levels. Learn more Customer case Exceeding the high-precision demands of integrated circuit manufacturing: the role of Vaisala’s instruments in cleanrooms Semiconductor manufacturing The client: China Electronics System Engineering CEFOF and semiconductor manufacturer Beijing Memory Technologies, Inc. (BJMT) The challenge: create a cleanroom environment with a monitoring system capable of monitoring really tight temperature and relative humidity tolerancesThe solution: Vaisala HMT370EX, Vaisala HMT120 and Vaisala HMT330. All perfect for the challenging process conditions delivering superior measurements Learn more Customer case Why Vaisala is a preferred vendor for many semiconductor fabrication plants for qualifying H2O2 concentration in CMP of tungsten RI measurement is a simple, cost-effective, and accurate technique that provides real-time information on slurry composition, making a refractometer the metrology instrument of choice for many fabrication plants. Learn more eGuide Understand and utilize real-time data in CMP process Accurate and fast RI and RH measurements for optimized CMP tool performance Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective, real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? Learn more Blog Quality semiconductor products need quality machinery enhanced with the best monitoring equipment In this blog, we look at Vaisala’s range of humidity and pressure sensors that ensure accurate measurements for manufacturers of the machines used to produce semiconductors. Learn more Blog Water is one of the most significant contaminants in semiconductor manufacturing – measure your moisture, humidity and temperature accurately To avoid issues with product quality and yield, moisture and temperature levels must be monitored extremely carefully in semiconductor manufacturing fabrications. Learn more Webinar Optimize Wafer Quality and Yield with Real-time Data During the CMP Process Register for this webinar to learn why Vaisala process refractometers have been installed by hundreds of semiconductor manufacturers worldwide. We’ll review the technology behind our measurement solutions and share common applications before sharing sample use cases from fabricators. Register to watch Webinar Ensure your yield in semiconductor and battery manufacturing Join this webinar and learn about different techniques for best measurement accuracy and quality, practical solutions for maintaining optimal manufacturing conditions in cleanroom and dry room conditions, and how to choose the right product for your application. Register to watch Contact us Interested to receive more information on a specific application or product? Drop us a line, and we'll get back to you! Contact us
Semiconductor manufacturing related products Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C. Read more Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Read more Indigo80 handheld measurement device The latest addition to the Indigo family of transmitters and probes, the Indigo80 is a compact, handheld indicator and data logger. Read more Indigo300 transmitter Vaisala Indigo300 transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. Read more Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features. Read more Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Read more Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications. Read more Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications. Read more Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability. Read more Vaisala K-PATENTS® Semicon Refractometer PR-33-S A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting. Read more
Dew Point Transmitter DMT152 The Vaisala DRYCAP® Dewpoint Transmitter DMT152 is designed for measuring low dew point in OEM applications, even down to -80°C. Read more
Dew Point and Temperature Probe DMP7 Vaisala DRYCAP® Dew Point and Temperature Probe DMP7 is made for tight spaces and low-humidity applications. Read more
Indigo80 handheld measurement device The latest addition to the Indigo family of transmitters and probes, the Indigo80 is a compact, handheld indicator and data logger. Read more
Indigo300 transmitter Vaisala Indigo300 transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. Read more
Indigo500 Series Transmitters The Vaisala Indigo500 series transmitters are host devices for Vaisala Indigo-compatible, stand-alone smart probes. The Indigo500 series include multi-functional Indigo520 transmitter and Indigo510 transmitter with basic features. Read more
Dew Point and Temperature Probe DMP8 Vaisala DRYCAP® Dew Point and Temperature Probe DMP8 is designed for industrial low-humidity applications with pressure up to 40 bars. Read more
Miniature Dew Point Transmitters DMT143 & DMT143L (Long) Miniature size dew point transmitters DMT143 and DMT143L are ideal choices when you want to measure dew point accurately in small compressed air dryers, plastic dryers, additive manufacturing and other OEM applications. Read more
Humidity and Temperature Probe HMP110 The Vaisala HUMICAP® Humidity and Temperature Probe HMP110 is a trouble-free and cost-effective humidity transmitter with high accuracy and good stability. The power consumption is low and it has fast startup for battery-powered applications. Read more
Differential Pressure Transmitter PDT102 A high performance instrument designed primarily for life science and high technology cleanroom applications, the PDT102 features a robust MEMS silicon sensor technology that provides superior accuracy, sensitivity, stability and durability. Read more
Vaisala K-PATENTS® Semicon Refractometer PR-33-S A compact refractometer with an ultra pure modified PTFE flow cell body for semiconductor liquid chemical processes. Connected to the process by a ¼ — 1 inch pillar or flare fitting. Read more
