Understand and utilize real-time data in CMP process Optimize processes for supreme wafer quality and yield Accurate and fast RI and RH measurements for optimized CMP tool performance Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective, real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? Vaisala’s inline process refractometers meet industry standards and can be conveniently integrated into slurry blenders and CMP tools. Relative humidity or RH measurements in slurry blending are critical to avoid slurry evaporation and eventual agglomeration. Recommended products are the Indigo520 with HMP7 and TMP1 for both temperature and relative humidity measurements directly in the CMP tool. In this eBook, we discuss: RI in process optimization RH as a critical measurement Installation position benefits Download the eBook by filling out the form. Go back to all wet-chemistry applications. See our Privacy Policy for more details. You can modify your preference settings or unsubscribe at any time here
Understand and utilize real-time data in CMP process Optimize processes for supreme wafer quality and yield
Accurate and fast RI and RH measurements for optimized CMP tool performance Did you know that the refractive index or RI measurement with an inline process refractometer is a safe, cost-effective, real-time, low-maintenance process monitoring method to accurately determine wet chemical concentrations? Vaisala’s inline process refractometers meet industry standards and can be conveniently integrated into slurry blenders and CMP tools. Relative humidity or RH measurements in slurry blending are critical to avoid slurry evaporation and eventual agglomeration. Recommended products are the Indigo520 with HMP7 and TMP1 for both temperature and relative humidity measurements directly in the CMP tool. In this eBook, we discuss: RI in process optimization RH as a critical measurement Installation position benefits Download the eBook by filling out the form. Go back to all wet-chemistry applications. See our Privacy Policy for more details. You can modify your preference settings or unsubscribe at any time here
