Bulk Chemical Delivery System

The semiconductor industry uses a broad range of wet processing chemicals, etchants, cleaning agents, and CMP slurries in the manufacture of integrated circuits or silicon chips including silicon wafers.

Bulk chemical delivery

Using a Vaisala K-PATENTS® Semicon Refractometer for measuring liquid concentration brings great benefits and savings as it helps to:

• Optimize etch process and increase the bath life of the etch solution (e.g. heated KOH).
• Increase wafer throughput and reduce cleaning chemical consumption (e.g. EKC).
• Achieve tight control of CMP slurries and better uniformity of the planarization process.
• Prevent incorrect bulk chemicals and chemical concentrations from entering into the process and effectively stops expensive equipment damage.
• The refractometer measures the concentration of KOH (Potassium hydroxide), H2SO4 (Sulfuric acid), HF (Hydrofluoric acid), NH4OH (Ammonium hydroxide), HCl (Hydrochloric acid), IPA (Isopropyl alcohol), EKC, CMP slurries, and others.

Vaisala’s application note explains how a semicon refractometer can improve process with recommended installation points for best performance, and shortly introduces the reliable technology our semicon refractometer is based on.

Download the application note for full details.

Discover all applications in Fab chemical process monitoring and fault detection

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