Maximize semiconductor quality & yield with smart sensors for measuring trace moisture & wet chemistry

Industrial Measurements

Liquid Measurements

Oct 3, 2024

1:00 p.m. EDT

Semiconductor wafer and microelectronics fabrication is a demanding process with little room for mistakes. The industry depends on high-performing measurement instrumentation for precise atmospheric conditions and chemical concentration data.

In many phases of the fabrication process, trace moisture can remain after impurities, such as dust, grease, and other polluting elements, have been removed. This can harm product quality and yield. While it’s impossible to completely remove every single water molecule from the process, the aim should be to minimize the presence of water with the help of accurate measurements.

Additionally, wet chemistry processes such as wafer cleaning and etching can benefit greatly from integrated sensors that provide real-time concentration data. Manufacturers can closely monitor chemical baths to ensure they are within pre-set parameters, guaranteeing only the optimal amount of raw material is used. Alarms can also be triggered when concentrations become out of specification before many wafers are impacted, reducing scrap, and maximizing throughput.

What you’ll learn:

The importance of detecting trace moisture in ultra-high purity gases, the largest source of contamination
Recommendations for what to look for in dew point instrumentation to ensure accurate measurement results
How wet chemistries impact wafer and subsequent semiconductor fabrication quality and quantity
The critical points to monitor with inline sensors to optimize chemical use

Join Vaisala Sales Manager Courtney Erickson and Regional Sales Manager Kevin Green for a technical presentation moderated by Pete Singer, Editor-in-Chief for Semiconductor Digest, to learn how to select the right sensors for accurate, repeatable measurements.

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Courtney Erickson, Sales Manager & Measurement Expert, Vaisala, Inc.

Courtney is a Sales Manager in Vaisala's Boston office and supports customers throughout North America. Her primary focus is business development within the semiconductor and battery industries. She holds a bachelor's degree in biomedical engineering and a master's degree in management, which she earned during her 9+ years with Vaisala.

Kevin Green, Industry Expert & Regional Sales Manager

Kevin has a background in Mechanical Engineering and brings many years of experience in instrumentation, sales and product management with companies such as Emerson – Rosemount Measurement, McCrometer, and ABB. At Vaisala he is primarily focused on measurement applications applied to industries such as semiconductors, food and beverage production, chemical processing, and pulp and paper manufacturing. In his spare time Kevin enjoys cycling and mountain biking, skiing, tennis, and spending time with family and friends.